详情描述
Chamber Size:Ф246×228mmSizes are subject to design specifications.，1Cr18Ni9TiStainless steel material, TIG welding.
2.Sample Table Dimensions: Detachable, Size:60×60mmRotary:0-20r/minAdjustableWafer can be heated up to3001℃Optional
3.Vacuum System: Mechanical Pump（TRP-12,3L/s）+PfeifferMolecular Pump(Hipace80,67L/s)；GDC-25bElectromagnetic gate valve
4.Ultimate Vacuum8.0×10-5Pa；
5.Vacuum Extraction Rate: Atmosphere ≤～10-5Pa；
7.Evaporation Source:3Interchangeable between groups; source has a protective grease board.
8.Evaporation Power Supply: 1 unit of DC evaporation power supply～CF35Flange connection
12.Total Equipment Power Supply≤2KW，220VSingle-phase three-wire system (one hot, one neutral, one ground)
13.Cooling circulation system: Water pressure0.2～0.4MPaWater temperature10～25℃Provide stable chilled water for the water-cooled components of the equipment.
询价单
