Yunxi Electromechanical High Acceleration High/Low Temperature Voice Coil Motor for Lithography Machine Applications

Voice Coil Linear Motor, also known as Lorentz motor or scanning mirror motor, derives its name from its structure resembling a loudspeaker's voice coil. It is a high-speed, direct-drive motor with fast response frequency. The voice coil motor boasts zero magnetic hysteresis, zero magnetic cogging effect, high frequency response, high acceleration, high speed, good force characteristics, easy control, compact size, and high resolution. Abroad, the voice coil motor is considered an excellent servo drive unit. Depending on the configuration of the drive, feedback, controller, and control algorithm, voice coil motors generally achieve a motion frequency of 500-1000Hz, even higher.

The oscillating voice coil motor utilizes the technology of the rectangular series products, bending them to form a certain angle for positioning, meeting the requirements of angular oscillation. The RS series can provide an oscillating angle of 90 degrees and a torque of up to 50 N-m. The oscillating voice coil motor products are applied in laser technology for mirror positioners, oscillating valve brakes, oscillating positioning, and flight controllers, involving the semiconductor industry, automation, and aerospace industries. The oscillating voice coil motor is also known as a "galvanometer."

Its basic working principle is that when an electric conductor passes through a magnetic field, it generates a force perpendicular to the lines of the magnetic field, the magnitude of which depends on the length of the conductor passing through the field, the strength of the magnetic field, and the intensity of the current. The voice coil motor converts actual current into linear thrust or torque, with their magnitudes being proportional to the actual current passing through. The magnitude of the thrust produced by the voice coil motor depends on the design structure and the intensity of the current: F = β*L*I. The relationship between current and the force generated is manifested as force sensitivity Kf in linear voice coil motors and torque sensitivity Kt in rotary voice coil motors. In our design, we define the unit of Kf as N/A, and the unit of Kt as N·m/A.

Yunxi Electromechanical Technology Co., Ltd., based in Langfang, is a technology R&D enterprise in collaboration with universities. Our main products include: brushless DC torque motors, voice coil motors, stepper motors, servo motors, and screw displacement tables; special products: vacuum high-temperature stepper motors, vacuum nuclear radiation stepper motors, vacuum high-temperature screw platforms, vacuum radiation screw platforms, vacuum electrodes, and ion gauges. We offer custom development and design services according to customer's specific requirements.

Contact: Mr. Guo

Tel:18101383264  

QQ 1024540961  

Email:18101383264@163.com