The compact body integrates a 6-degree-of-freedom active vibration damping mechanism, capable of providing vibration environments unattainable by previous passive types. This machine maximizes the high precision and high resolution capabilities required by the rapidly evolving nanotechnology field in recent years.

Application:

Scanning Probe Microscopes, Confocal Laser Microscopes, Interferometer Systems, 3D Shape Meters, and other precision measuring and machining equipment.

6 Degrees of Freedom Active Control

You can continuously monitor the vibration of the mounting plate, apply a counter-force in the reverse position through the built-in driver, thereby achieving vibration control. This enables 3D (6 degrees of freedom) control.

Auto Active Adjustment & Auto Horizontal Adjustment

The indispensable gain adjustment for active control utilizes a unique control system from Mingli Precision Machinery, enabling automatic optimization through this method.