【Function Introduction】
1. The equipment consists of 3 zones: preheat, heat, and cool (each with an independent process chamber); each chamber features an observation window, and the process chamber pressure ranges from 0.2 to 1050 mbar.
2. The equipment supports nitrogen and other atmosphere environments, with precise control capabilities; it also supports vacuum curing processes for electrical products.
3. Programmable Multi-Stage Vacuum Extraction Function: Each cavity features an independent vacuum pump and control system, vacuum level ≤ 1mbar, extraction rate of 100m³/h, equipped with soft extraction valve, adjustable speed. Real-time display of cavity vacuum values, with control and adjustment capabilities.
4. Utilizes contact heating with a heating plate and contact cooling with a cooling plate, both measuring 685*350mm in area. The heating plate separator can bear a load of ≥20 kg. Heating rate: 1-3℃/S, cooling rate: 3-6℃/S, both programmable.
5. Operating temperature: room temperature to 260°C, temperature control accuracy ≤ ±0.5°C, temperature uniformity ≤ ±1%.
6. Post-curing, individual pore rate is less than 2%, and total pore rate does not exceed 3% (for sizes 10*10mm and above), the process curve can be adjusted according to specific requirements; without fixture positioning, the product's displacement after curing meets process demands (displacement ≤ 0.2mm, angle ≤ 1 degree).
7. Process Control: 1) Temperature gradients and time at each stage of curing can be freely programmed and saved as needed.
2) Capable of automatically generating all process curves and editing process programs.
3) Equipped with a digital mass flow controller (MFC) for controlling process gas flow.
8. Self-developed control program that allows real-time monitoring and data recording, displaying and recording temperature, flow, and vacuum data in real time; equipped with program permission management (administrators, engineers, and operators) to prevent accidental alteration of program parameters.
9. The equipment features cavity leakage alarms (alarms when vacuum failure or gas leakage is detected), gas supply pressure alarms (alarms when the gas line pressure is too low), cavity overpressure alarms (alarms when the cavity pressure is too high), and overtemperature alarms (alarms when the temperature exceeds the set temperature). It is equipped with an independent gas protection system, and all electrical doors are equipped with locking devices.
10. The heating plate has an average lifespan (flatness) of over 5 years. The temperature control system features intelligent temperature calibration and can compensate for temperature differences. It is equipped with MES functionality, allowing for the opening of relevant interfaces and features to obtain the information required by the customer, adhering to SEMI communication standards SECS/GEM.
11. Equipped with track interfaces at both ends, it can be connected to a pick and place machine via the track.
12. Modular equipment design with a separate heating tube and heating plate. In case of temperature uniformity changes after long-term use, it's not necessary to replace the entire heating plate; simply replace the affected heating tubes. This facilitates adjusting the temperature uniformity of each heating plate, and makes maintenance and temperature performance calibration easier.
