‌Manual high vacuum plug valve‌ is a critical component in ultra-high vacuum systems, primarily used for opening or closing air flow to ensure stable system operation. It operates by handwheel-driven screw transmission, which moves the valve plate along the axial direction through a linkage mechanism, thereby achieving the opening or closing of the valve.‌

Performance Features

High vacuum sealing performance: The manually operated high vacuum plug valve features a precise sealing design, such as metal O-ring or metal face sealing, capable of achieving a leakage rate as low as 10^-9 Pa·L/s or even lower, ensuring the stability and reliability of the vacuum system.

‌Rapid Open/Close: The manual plug valve structure is simple and easy to operate, enabling quick opening and closing of the vacuum system, enhancing work efficiency. Some high-end models are equipped with a fine-tuning mechanism, allowing users to precisely control the degree of valve opening.‌

Corrosion Resistance: Many manual high vacuum plug valves are made with corrosion-resistant materials and surface treatments, effectively resisting erosion from various corrosive gases and mediums, thereby extending the valve's lifespan.

High Reliability: Due to its simple structure and minimal internal components, it boasts a low failure rate. The design has undergone rigorous testing and validation, ensuring stable operation in harsh environments.

‌Multiple Specifications and Materials: Manual high vacuum plug valves from various manufacturers and models offer a range of specifications and materials to meet the needs of different vacuum systems._

Application Fields

Manually operated high vacuum plug valves are widely used in various fields requiring ultra-high vacuum environments, including:

Semiconductor Manufacturing: In the process of semiconductor chip manufacturing, strict control of a vacuum environment is essential to prevent contamination and enhance product quality. Manually operated high-vacuum gate valves are commonly used in the vacuum chambers of wafer manufacturing equipment to control the transport of gases and materials.

Scientific Research: Experiments in particle physics, materials science, and surface physics, among others, require ultra-high vacuum conditions. Manual high-vacuum plate valves can effectively isolate the vacuum chamber, ensuring experimental precision and reliability.

Aerospace: In the manufacturing and maintenance of spacecraft, manual high vacuum plug valves are used to ensure the vacuum environment for various equipment, guaranteeing the normal operation and safety of the equipment.