A manual high vacuum plug valve is a crucial component in ultra-high vacuum systems, primarily used for connecting or disconnecting airflow to ensure stable system operation. Its working principle is driven by a handwheel through a screw drive mechanism, which pushes (pulls) a connecting rod mechanism, causing the valve plate to move axially, thereby opening or closing the valve.

Performance Features

High Vacuum Sealing Performance: The manually operated high vacuum plug valve features a precise sealing design, such as metal O-ring sealing or metal face sealing, enabling leakage rates as low as 10^-9 Pa·L/s or even lower, ensuring the stability and reliability of the vacuum system.

‌Rapid Open/Close: The manually operated plate valve features a simple structure and easy operation, enabling quick opening and closing of the vacuum system, thus enhancing work efficiency. Some high-end models are equipped with a fine-tuning mechanism, allowing users to precisely control the degree of valve opening.‌

Corrosion Resistance: Many manual high vacuum plug valves are made with corrosion-resistant materials and surface treatment processes, effectively resisting erosion from various corrosive gases and mediums, thus extending the valve's service life.

High Reliability: With its simple structure and minimal internal components, it boasts a low failure rate. The design has undergone rigorous testing and validation, ensuring stable operation in harsh environments.

‌Various Specifications and Materials: Manual high vacuum spool valves from different manufacturers and models offer a range of specifications and materials to meet the needs of various vacuum systems._

Application Fields

Manually operated high vacuum plate valves are widely used in various fields requiring ultra-high vacuum environments, including:

Semiconductor Manufacturing: In the process of semiconductor chip manufacturing, strict control of the vacuum environment is necessary to prevent contamination and enhance product quality. Manually operated high-vacuum spool valves are commonly used in the vacuum chambers of wafer manufacturing equipment to control the transport of gases and materials.

Scientific Research: Experiments in particle physics, materials science, and surface physics, among others, require ultra-high vacuum conditions. Manual high-vacuum spool valves can effectively isolate the vacuum chamber, ensuring the precision and reliability of the experiments.

Aerospace: In the manufacturing and maintenance of spacecraft, manual high vacuum plug valves are used to ensure the vacuum environment for various equipment, guaranteeing their normal operation and safety.