Alcat Vacuum Technology has been committed to developing products to meet the needs of semiconductor applications for 15 years. On this foundation, Alcat has accumulated years of experience and introduces a new series of high-capacity dry pumps.

These pumps meet stringent vacuum requirements for L/L evacuation in FPD, solar energy, and other industrial applications.

Two different models are available for selection based on the required flow rate: AD30KL and AD70KL.

Key Features

High flow rate (unique automatic increase mode)

Small land area

Low CoO

Reduce power consumption, automatic standby mode

Small cooling water demand

No N2 purification required

Energy-efficient choice: Save on power!

The ADKL series is specially designed to reduce operating costs.

Compared to traditional exhaust solutions, it can save up to 50% of energy consumption. Its main features include lower cooling water demand and no need for N2 purification. High-capacity rapid exhaust and pressure reduction:

AD30KL：1800 m3/h

500L from ATM to 10-1 mbar, emptying time < 25s

AD70KL：3270 m3/h

1000L from ATM to 10-1 mbar, emptying time < 34s

Application:

· High-vacuum FPD Sample Chamber

· Solar Manufacturing Sample Room

High-capacity rapid exhaust

· Bulk recycling applications