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GRDLC（diamond-like carbon）镀膜设备
主要特点采用反应气体等离子源辅助沉积，对工件进行预清洗及镀膜时的辅助沉积。采用大功率的脉冲偏压电源，增强膜层的附着力。 3
2023-04-03
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