Chamber Size:Ф246×228mmSizes are subject to design specifications.，1Cr18Ni9TiStainless steel material, TIG welding.

    2.Sample Table Dimensions: Detachable, Size:60×60mmRotary:0-20r/minAdjustableWafer can be heated up to3001℃Optional

    3.Vacuum System: Mechanical Pump（TRP-12,3L/s）+PfeifferMolecular Pump(Hipace80,67L/s)；GDC-25bElectromagnetic gate valve

    4.Ultimate Vacuum8.0×10^-5Pa；

    5.Vacuum Extraction Rate: Atmosphere ≤～10^-5Pa；

        7.Evaporation Source:3Interchangeable between groups; source has a protective grease board.

    8.Evaporation Power Supply: 1 unit of DC evaporation power supply～CF35Flange connection

12.Total Equipment Power Supply≤2KW，220VSingle-phase three-wire system (one hot, one neutral, one ground)

13.Cooling circulation system: Water pressure0.2～0.4MPaWater temperature10～25℃Provide stable chilled water for the water-cooled components of the equipment.