Electro-pneumatic High Vacuum Plate Valve is a valve designed for high vacuum environments, primarily used for cutting off or connecting air flow. Its core advantages include high vacuum sealing performance, rapid opening and closing speed, stable operation, and a variety of size and specification options. These valves are usually driven by electric motors, featuring smooth operation, minimal shock and vibration, and reliable use.

Structure and Working Principle

The electric high vacuum plug valve is mainly composed of the valve body, valve plate, screw rod, and driving unit. The driving unit can be a three-phase asynchronous motor or a variable-frequency motor, which is connected to the screw rod through a reducer to move the valve plate up and down within the valve body, thereby achieving the opening and closing action. In the closed state, the valve plate is tightly sealed with the valve body, ensuring that the fluid cannot pass through.

Application Fields

Electromagnetic high vacuum plate valves are widely used in various fields requiring high vacuum environments, such as semiconductor manufacturing, scientific research experiments, and vacuum metallurgy. In these areas, high vacuum environments demand high sealing performance from valves, making electromagnetic high vacuum plate valves highly favored for their reliability and stability.

Material and manufacturing process

These valves are typically made of materials such as stainless steel and aluminum alloy, complemented by high-performance seals (such as metal and Viton seals), ensuring low leakage rates under long-term high vacuum conditions. Moreover, the manufacturing process of these valves has undergone rigorous testing and inspection to ensure stable and reliable performance.