Luoyang Sigma Furnace
The SGM.T60/12 vacuum tube CVD is a small-sized CVD tube furnace for laboratories. The small CVD tube furnace consists of the T60/12 tube furnace, a vacuum system, and a 3-way gas mixing system.
Small CVD tube furnaces are primarily used to provide a high-temperature heat treatment environment in laboratories for institutions of higher education, research organizations, factories, and enterprises across various industries. They are applicable in new material fields such as metal materials, graphite materials, lithium battery materials, and crystal materials.
Structural Features
1. Integrated structure, aesthetically pleasing and spacious, with minimal space occupancy.
2. The furnace chamber is made of high-purity alumina ceramic fiber material with a new assembly structure, which ensures non-deformation at high temperatures and durability.
3. Furnace tubes are made of quartz or alumina tubes. The stainless steel flange design is simple, reasonable, and easy to disassemble, facilitating the insertion and removal of sintered samples.
4. Rapid heating rate, typically takes 15-30 minutes to heat from room temperature to 1000 degrees Celsius.
5. Utilizing Xiamen Yudian or Japan's Shimaden temperature control instruments, featuring high temperature control accuracy, minimal temperature fluctuations, and temperature compensation and calibration capabilities, with an accuracy of ±1℃.
6. The temperature control instrument features programmable capabilities, allowing for the setting of heating curves and programming up to 30 program segments.
7. All electronic components are of high-quality products with built-in leakage protection for safety and reliability.
8. The machine will emit an alarm signal for over-temperature during operation and automatically complete the protective action.
9. Once the instrument program is set, simply press the run button, and the subsequent work will be completed automatically.
10. Gas line systems can be equipped with a single or triple-path mass flow meter, with a mixing system that can be set for single input/output. Digital precision gas flow control is provided, and flow switches and flow timers can be automatically controlled via a touch screen, enabling unattended gas line control. Accuracy: ±1% F.S., Response time: ≤4 sec.
11. The vacuum system employs a scroll-type vacuum pump or vacuum unit. The vacuum degree is measured using a digital composite vacuum gauge, or a Pirani vacuum gauge can also be chosen. The measuring instruments are integrated into the temperature control panel for easy operation.
Small vacuum tube CVD
Model | SGM.T40/12 | SGM.T60/12 | SGM.T80/12 | SGM.T100/12 | SGM.T120/12 |
Furnace Tube Dimensions | Φ40x800mm | Φ60x800mm | Φ80x800mm | Φ100x800mm | Φ120x800mm |
Rated Temperature | 1200℃ | ||||
Operating Temperature | 1100℃ | ||||
Heating zone dimensions | 300mm | ||||
Power Voltage | 220V/1.8KW | 220V/2.6KW | 220V/2.6KW | 220V/2.6KW | 220V/5KW |
Heating Element | HRE alloy resistance wire | ||||
Furnace chamber material | Hydrophilic vacuum filtration molding prepared polycrystalline inorganic alumina ceramic fiber material | ||||
Boiler Tube Material | High-purity quartz tubes | ||||
Temperature Control Accuracy | ±1℃ | ||||
Thermoelectric sensor | Type K Thermocouple | ||||
Temperature Control Gauge | Xiamen Yudian Intelligent Microcomputer PID Temperature Control Instrument, SCR/SSR control, PID parameter self-tuning function; programmable for 30 time periods, program heating, program holding, program cooling | ||||
Rising temperature rate | 1-25°C/min freely adjustable | ||||
Furnace body structure | Combustion chamber with integrated temperature control structure, open/close design of the combustion chamber; double-layered shell, air circulation insulation | ||||
Sealing Performance | Both ends of the furnace tube are equipped with quick flanges made of 304 stainless steel, paired with high-temperature PTE gaskets, capable of operation under vacuum, with a sealing vacuum degree ≤ 0.0001 Pa. | ||||
Atmospheric performance | The flanges feature both intake and exhaust ports, with a pressure gauge mounted on the metal flange. A precise needle valve can adjust the intake and exhaust flow, allowing for the introduction of protective gases such as nitrogen, argon, and hydrogen. | ||||
Vacuum Obtained | Comprehensive vacuum acquisition system, featuring a bipolar scroll vacuum pump and a digital vacuum gauge, includes components such as stainless steel bellows and check valves, with a system vacuum level of ≤5Pa. Optional molecular pump unit available. | ||||
Airline System | Complementing the gas circuit system, the system consists of three float flowmeters, features a mixing chamber, and can be configured for either single inlet/outlet or the mixing of three gas streams before entering the tubular furnace system. Flow metering range: 60-600 ml/min; also available with an automatic mass flow meter system, controlling accuracy ±1.5%FS, repeatability ±0.2%FS. Range: Channel 1: 0/100 SCCM, Channel 2: 0/200 SCCM, Channel 3: 0-500 SCCM | ||||
Equipment Protection | Modular control with audible and visual alarm signals for over-temperature and disconnection during operation, and automatic protection actions. | ||||
Safety Protection | The equipment is equipped with an automatic circuit breaker that will trip in the event of a short circuit or leakage, ensuring the safety of both the equipment and the operator. | ||||
Shell | Quality cold rolled steel plate cutting and processing under CNC machine tools, followed by welding, polishing, buffing, phosphatizing, acid washing, and surface electrostatic powder coating. | ||||
Standard Configuration | 1. Furnace unit 1 2. Temperature controller 1 3. Power cord 3 meters 4. One thermocouple 5. One instruction manual 6. One furnace hook 7. Pair of High-Temperature Gloves 8. Two Pipe Plugs 9. Set of Sealing Flanges | ||||
